High Rate Deposition of High Quality ZnO:Al by Filtered Cathodic Arc
نویسندگان
چکیده
منابع مشابه
Achieving high mobility ZnO : Al at very high growth rates by dc filtered cathodic arc deposition
Achieving a high growth rate is paramount for making large-area transparent conducting oxide coatings at a low cost. Unfortunately, the quality of thin films grown by most techniques degrades as the growth rate increases. Filtered dc cathodic arc is a lesser known technique which produces a stream of highly ionized plasma, in stark contrast to the neutral atoms produced by standard sputter sour...
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The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
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Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been examined by ultraviolet (UV) at 325 nm and visible Raman spectroscopy at 457 nm excitation wavelength. The comprehensive study of behaviour of G, D and T band with sp/sp content has been carried out. The upwards shift of the G peak with sp content was observed for both...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2011
ISSN: 0272-9172,1946-4274
DOI: 10.1557/opl.2011.1285